Systems and methods for producing flat surfaces in interconnect structures

ABSTRACT

In interconnect fabrication (e.g. a damascene process), a conductive layer is formed over a substrate with holes, and is polished to provide interconnect features in the holes. To prevent erosion/dishing of the conductive layer at the holes, the conductive layer is covered by a sacrificial layer (possibly conformal) before polishing; then both layers are polished. Initially, before polishing, the conductive layer and the sacrificial layer are recessed over the holes, but the sacrificial layer is polished at a lower rate to result in a protrusion of the conductive layer at a location of each hole. The polishing can continue to remove the protrusions and provide a planar surface.

INCORPORATION BY REFERENCE

All publications, including patents and patent applications, mentionedin this specification are herein incorporated by reference in theirentirety to the same extent as if each individual publication wasspecifically and individually indicated to be incorporated by reference.

FIELD OF THE INVENTION

The present invention relates generally to semiconductor device andmethods pertaining to their manufacture. More specifically, the presentinvention relates to devices and methods for reducing/eliminatingdishing defects in interconnect structures.

BACKGROUND OF THE INVENTION

Semiconductor chips are fabricated on suitable flat substrate wafers,such as GaAs, diamond coated substrates, silicon carbide, siliconwafers, etc. After making the active devices, a series of steps areperformed to connect the various devices with highly conducting wiringstructures, so they can have communication with each other to performlogic operations. These wiring structures or interconnect structures areessentially a skeletal network of conducting materials, typically metalsin a matrix of dielectric materials. In high performance devices and toimprove device density and yield, it is imperative to minimizetopographic features within the interconnect layers for any given deviceand across the entire substrate. One common method of forming these highperformance interconnect layers is the damascene process.

Multiple types of damascene structures are known, however the single anddual damascene are the most common. In single damascene, each metal orvia layer is fabricated in a series of operations, while in dualdamascene, a metal level and a via level are fabricated in a similaroperation. Of these two, the dual damascene step is often preferredbecause of lower cost and higher device performance.

In the dual damascene process, a suitable substrate with or withoutdevices is coated with a suitable resist layer. The resist layer isimaged to define desirable patterns by lithographic methods on thesubstrate. Cavities are etched on the patterned substrates typically byreactive ion etching methods, RIE. The patterned substrate is thencoated with a suitable barrier/seed layer prior to overfilling thecavities with a suitable metal, typically copper by electro-depositionfrom a superfilling plating bath chemistry.

The damascene process is repeated to form the many layers ofinterconnect. As a result of the discontinuity in the properties(difference in mechanical properties, polishing rates, etc) of the metaland insulator, and their respective interactions with the polishing pad,polishing slurry, and other process parameters produces erosion in highmetal pattern density features and dishing in large metal structures.The higher the metal pattern density, the higher the erosion, similarly,the larger the size of the metal cavity, the worse the gravity of thedishing defect. These deleterious defects cause shorting defects insubsequent levels, reducing device yield.

Similar results are observed in cross section topographic profiles ofpolished TSV structures. The center of the vias are typically lower thanthe surface of the insulators.

One of the consequences of dishing in the interconnect structures ispoor flatness of the conductor and much higher pressures are typicallyneeded to bond devices to the dished substrate or for wafer to waferbonding. One method used to improve wafer to wafer bonding is toselectively recess the dielectric layer, so that the copper structuresare protruding above the insulator surface prior to the bondingoperation. This operation adds additional cost to the technology and isa source of defect when not properly implemented. Also, the poorflatness on the conductor surface often produces defect bonds, when thesaid surface is bonded or attached to other devices or substrates.

Other attempts to reduce the impact of these defects have lead to theincorporation of dummy dielectric features within large copperstructures in dual damascene feature for chip interconnects. Thisapproach has been helpful, but it has also increased mask designcomplexity and the associated loss of freedom of structure placement onthe modified pads.

SUMMARY OF THE DISCLOSURE

in one embodiment, a method of forming a semiconductor interconnectstructure is provided, comprising forming a cavity in a substrate,depositing a barrier layer on the cavity and on a first surface of thesubstrate, depositing a conductor on the barrier layer and inside thecavity, depositing a conductive sacrificial layer on the conductor, andremoving portions of the conductive sacrificial layer, the conductor,and the barrier layer from the first surface until the conductor insidethe cavity is angled greater than or equal to zero with respect to thefirst surface of the substrate.

In some embodiments, the removing step comprises removing portions ofthe conductive sacrificial layer, the conductor, and the barrier layeruntil the conductor inside the cavity comprises a planar surface that iscoplanar with the first surface of the substrate. In other embodiments,the removing step comprises removing portions of the conductivesacrificial layer, the conductor, and the barrier layer until theconductor inside the cavity comprises a substantially convex surfacethat extends above the first surface of the substrate.

In one embodiment of the method, the conductor comprises copper.

In an additional embodiment, the removing step comprises a chemicalmechanical polishing process. In another embodiment, the removing stepcomprises an ECMP process.

In some embodiments of the method, the depositing a conductivesacrificial layer step further comprises electrolessly orelectrolytically depositing a conductive sacrificial layer on theconductor.

In one embodiment, a corrosion rate of the conductive sacrificial layeris less than a corrosion rate of the conductor. In another embodiment, apolishing rate of the conductive sacrificial layer is less than apolishing rate of the conductor.

In some embodiments, the conductive sacrificial layer comprises amaterial selected from the group of Ni, Ni alloys, NiP, NiB, NiW, NiWB,NiCoP, NiMoP, NiGa nickel-tungsten, cobalt alloys, CoP, CoWP, CMoP,copper alloys, copper-tungsten, Cu—Ga, and Cu—In.

In additional embodiments of the method, the depositing a conductivesacrificial layer step further comprises depositing a conductivesacrificial layer having a thickness ranging from approximately 3 nm to300 nm on the conductor. Alternatively in another embodiment, thedepositing a conductive sacrificial layer step further comprisesdepositing a conductive sacrificial layer having a thickness rangingfrom approximately 5 nm to 50 nm on the conductor. In some embodiments,the conductive sacrificial layer comprises a conformal layer. In anotherembodiment, the conductive sacrificial layer comprises an electroplatedmetal.

Another method of forming a semiconductor device is provided, comprisingdepositing a barrier layer on a substrate comprising at least onecavity, depositing a conductor on the barrier layer to overfill the atleast one cavity, depositing a conductive sacrificial layer on theconductor, and removing the conductive sacrificial layer, the conductor,and the harrier layer from portions of the substrate adjacent to the atleast one cavity to form an interconnect structure.

In some embodiments, the interconnect structure comprises a flat surfacethat is co-planar with a top surface of the substrate. In otherembodiments, the interconnect structure comprises a top surface thatangles upwards from a first surface of the substrate.

In some embodiments, the interconnect structure comprises a damascenestructure. In other embodiments, the interconnect structure comprises athrough-silicon via structure or interposer.

In one embodiment of the method, the removing the conductive sacrificiallayer step further comprises removing the conductive sacrificial layer,the conductor, and the barrier layer or adhesion layer or coupling layerfrom portions of the substrate adjacent to the at least one cavity untilthe conductor within the interconnect structure forms a substantiallyconvex surface.

In another embodiment of the method, the removing the conductivesacrificial layer step further comprises removing the conductivesacrificial layer, the conductor, and the barrier layer from portions ofthe substrate adjacent to the at least one cavity until the conductorwithin the cavity forms a flat surface.

Another method of forming a semiconductor interconnect structure isprovided, comprising forming a cavity in a substrate, depositing abarrier layer on the cavity and on a first surface of the substrate,depositing a conductor on the barrier layer, or adhesion layer orcoupling layer inside the cavity, depositing a conductive sacrificiallayer on the conductor, and removing portions of the conductivesacrificial layer, the conductor, and the barrier layer from the firstsurface until the conductor inside the cavity comprises a planar surfacethat is coplanar with the first surface of the substrate.

A semiconductor structure is also provided, comprising a substrate, andan interconnect structure disposed on the substrate, the interconnectstructure having a top planar surface that is coplanar with thesubstrate.

In some embodiments, the interconnect structure comprises a damascenestructure. In other embodiments, the interconnect structure comprises aTSV structure. In other embodiments, the substrate is an interposer. Inone embodiment, the substrate and structure is a flat display panel.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A-1F illustrate one method of forming a semiconductorinterconnect structure.

FIGS. 2A-2G illustrate another method of forming a semiconductorinterconnect structure.

FIGS. 3A-3E illustrate yet another method of forming a semiconductorinterconnect structure.

DETAILED DESCRIPTION OF THE INVENTION

FIGS. 1A-1F illustrate a conventional method and approach for forming adamascene structure on a semiconductor device 100. FIG. 1A illustrates asubstrate 102 having cavities 104 a, 104 b, and 104 c formed in thesubstrate below a top or first surface 106 of the substrate. Thecavities can be formed by any process known in the art, such as bycoating the substrate with a suitable resist layer, imaging the resistlayer to define lithographic patterns on the substrate, and etching thecavities on the patterned substrate, such as with a reactive ion etching(RIE) method. The substrate can comprise any suitable wiring substrate,semiconductor, or non-semiconductor substrate used in devices, packages,or flat panels. Such substrate can be, for example, wafers, siliconwafers, glass, glass ceramic, ceramics, sapphire, interposer substrate,or wiring boards, for example. FIG. 1A illustrates the formation of bothsingle damascene (104 b) and dual damascene (104 a and 104 c)structures.

Referring to FIG. 1B, a barrier/seed layer, or a platable adhesion orcoupling layer 108 can be deposited on the substrate, including on thetop surface of the substrate and on the side and bottom walls ofcavities 104 a-104 c. After application of the barrier/seed layer, aconductor 110 can be deposited on the barrier/seed layer 108 to overfillthe cavities, as shown in FIG. 1C. In one embodiment, the conductorcomprises copper and is deposited on the barrier layer and inside thecavities by electro-deposition from a superfilling plating bathchemistry. In other embodiments, the conductor comprises aluminum,nickel, tungsten, copper tungsten alloy.

Next, the conductor coated substrate can be removed/polished to removeexcess conductor and barrier/seed layer from the semiconductor device.In some embodiments, this process is achieved with a chemical-mechanicalpolishing (CMP) or electro-chemical-mechanical polishing (ECMP) device.FIG. 1D illustrates the remaining conductor portions as interconnectstructures 112 a-112 e within the cavities (e.g., within cavities 104a-104 c), after the removing or polishing step. It should be noted thatin the conventional interconnect formation process described thus far,the interconnect structures, as shown in FIG. 1D, comprise concave or“di shed” top surfaces. More specifically, the conductor dips or curvesdown from the edge of the substrate into the cavity.

FIG. 1E illustrates a close-up view of interconnect structure 112 a fromFIG. 1D contained within circle 1E-1E, and more clearly shows thedishing described above in FIG. 1D. Referring to FIG. 1E, it is clearthat the interconnect structure 112 a dishes or curves downward frominterface between the barrier layer 108 and the substrate 102. This isfurther illustrated by referencing imaginary dashed line 114, whichextends from top surface 106 of the substrate 102. As shown by angle θ,the surface of the conductor inside the cavity is angled less than zerowith respect to the first or top surface 106 of the substrate 102.Generally speaking, the center of the interconnect structures arerecessed to be lower than the top surface of the substrate and lowerthan the edges of the interconnect structures.

In an alternative embodiment, FIG. 1F illustrates dishing defects ofinterconnect structures 112 a-112 c in through-silicon via (TSV)structures. The formation of the TSV structures with a substrate 102,cavities, a barrier layer 108, and interconnect structures 112 a-112 ccan be similar to as described above with respect to the damasceneprocess.

A method of reducing or eliminating dishing defects on substrates willnow be described. Referring now to FIG. 2A, a semiconductor device 200comprises a suitable substrate 202, barrier/seed layer 208, andconductor 210. As shown in the figure, the barrier/seed layer and theconductor are both deposited in cavities formed in the substrate. Themethods of forming the cavities and depositing the barrier/seed andconductor layers can be the same as they are described above withrespect to FIGS. 1A-1C.

In contrast to the conventional approach, the present method furtherincludes the step of depositing a conductive sacrificial layer 216 onthe conductor 210 prior to the removing/polishing step. In oneembodiment of this invention, the sacrificial material is coated on theconductor material after the gap filling process. In another embodiment,the sacrificial material is coated over the conductor after thermaltreatment of the conductor to stabilize the grain size or structure ofthe coated conductor.

Referring again to FIG. 2A, the conductive sacrificial layer 216 can bea material dissimilar to the conductor 210 upon which it is deposited.For example, in embodiments where the conductor 210 comprises copper,the conductive sacrificial layer 216 can comprise any conductivematerial except for copper.

In some embodiments, a corrosion rate or dissolution/polishing rate ofthe conductive sacrificial layer 216 is lower than that of the conductor210. In other embodiments, the conductive sacrificial layer 216 can beelectrolessly deposited on the conductor 210. In additional embodiments,the conductive sacrificial layer 216 can comprise Ni, Ni alloys, NiP,NiB, NiW, NiWB, NiCoP, NiMoP, NiGa nickel-tungsten, cobalt alloys,copper-tungsten, CoP, CoWP, CMoP, or any other similar suitablematerials. In yet another embodiment, the conductive sacrificial layercan have a thickness ranging from approximately 3 nm to 300 nm on theconductor, or more specifically, can have a thickness ranging fromapproximately 5 nm to 50 nm on the conductor. In another embodiment, theconductive sacrificial layer can comprise a low dielectric constantmaterial. In other embodiments, the conductive sacrificial layercomprises a conformal layer, or an electroplated metal. In otherembodiments, more than one sacrificial layer may be coated.

After depositing the conductive sacrificial layer on the conductor,portions of the conductive sacrificial layer 216, the conductor 210, andthe barrier layer 208 can be removed or polished, such as with a CMP orECMP process. FIG. 2B illustrates the semiconductor device 200 after anintermediate polish with a CMP machine. In FIG. 2B, only portions of theconductive sacrificial layer remain, illustrated as portions 218 a, 218b, and 218 c. Also shown, some portions of the conductor 210 have beenpolished away. FIG. 2C illustrates the semiconductor device 200 afteradditional polishing. In FIG. 2C, a thin layer of conductor 210 stillremains over the barrier layer 208, and the portions of the conductorover the cavities resemble a convex or domed surface, as shown. Theconductive sacrificial layer has been completely removed by this stagein the process.

Further polishing/removing of portions of the conductive sacrificiallayer is illustrated in FIG. 2D. As illustrated, portions of theconductive sacrificial layer, the conductor, and the barrier layer havebeen removed from the top surface of the substrate so that the conductorinside each of the cavities (e.g., interconnect structures 212 a, 212 b,and 212 c) each resemble a convex surface that extends above the topsurface 206 of the substrate. In FIG. 2D, the conductive sacrificiallayer, the conductor, and the barrier layer have been removed fromportions of the substrate adjacent to each of the interconnectstructures.

FIG. 2E illustrates a close-up view of the interconnect structure 212 afrom FIG. 2D contained within circle 2E-2E, and more clearly shows thedomed or upwardly curved surface described above in FIG. 2D. Referringto FIG. 2E, it is clear that the interconnect structure 212 a curvesupward from the interface between the barrier layer 208 and thesubstrate 202. This is further illustrated by referencing imaginarydashed line 220, which is angled upwards from top surface 206 of thesubstrate 202. As shown by angle θ, the surface of the conductor insidethe cavity is angled upwards greater than zero with respect to the firstor top surface 206 of the substrate 202. Generally speaking, the centerof the interconnect structures are raised to be higher than the topsurface of the substrate. The interconnect structures formed andillustrated in FIGS. 2D-2E can be any type of damascene interconnectstructure, such as a single or dual damascene structure.

In the embodiment described above, polishing/removing portions of theconductive sacrificial layer, the conductor, and the barrier layer canresult in the formation of an interconnect structure resembling a convexor domed surface, where an angle of the surface of the conductor insidethe cavity is greater than zero with respect to the top surface of thesubstrate. However, in some embodiments, polishing/removing theconductor can result in the ideal flat or co-planar interconnectstructure. FIGS. 2F and 2G illustrate the method step of removingportions of the conductive sacrificial layer, the conductor, and thebarrier layer from the top surface of the substrate until the conductorinside the cavity is angled equal to zero with respect to the topsurface, or alternatively, until the conductor inside the cavitycomprises a planar surface that is coplanar with the top surface of thesubstrate. This method step results in a semiconductor structure thatcomprises a substrate and an interconnect structure disposed on thesubstrate, where the interconnect structure has a top planar surfacethat is coplanar with the substrate.

FIG. 2F shows interconnect structures 212 a, 212 b, and 212 c having topsurfaces that are co-planar or substantially co-planar with top surface206 of the substrate 202, and FIG. 2G illustrates a close up view ofinterconnect structure 212 a and its flat top surface.

FIGS. 3A-3E illustrate methods for forming semiconductor devices 300with TSV structures having flat/co-planar top surfaces, oralternatively, having top surfaces that are angled upwards greater thanor equal to zero with respect to the top surface of the substrate. Themethod steps for forming these TSV structures are substantially similarto the method steps described above in FIGS. 2A-2G.

Referring to FIG. 3A, a substrate 302 includes a barrier/seed layer,adhesion layer or coupling layer 308, a conductor 310, and a conductivesacrificial layer 316 disposed on the conductor. In FIG. 3B, a portionof the conductive sacrificial layer and the conductor have beenpolished/removed, leaving only portions 318 a, 318 b, and 318 c ofconductive sacrificial layer remaining. In FIG. 3C, furtherpolishing/removal of the conductive sacrificial layer and the conductorhas left only a thin layer of conductor over the barrier/seed layer, aswell as slightly domed surfaces over the cavities. Furtherpolishing/removal of the conductor and barrier/seed layer can result inthe domed interconnect structures 312 a, 312 b, and 312 c with topsurfaces angled at greater than zero with respect to the top surface 306of the substrate, as shown in FIG. 3D, or alternatively, can result inthe domed interconnect structures 312 a, 312 b, and 312 c with flat orco-planar top surfaces, as shown in FIG. 3E. The interconnect structuresformed and illustrated in FIGS. 3D-3E can be any type of TSVinterconnect structure. Additionally, the methods described herein canbe used with any of the interconnect structures described in U.S.application Ser. No. 12/221,204, or U.S. application Ser. No.12/646,836, both of which are incorporated herein by reference.

In some embodiments of the invention described above, the interconnectstructures manufactured with the methods described herein form a metallevel within a substrate. In other embodiments, the interconnectstructures form a via level within a substrate.

In some embodiments, the pattern substrate herein known as the firstmaterial, is coated with a second material and the second material maybe a coupling layer or an adhesive layer or a barrier/seedlayer or theirvarious combinations. The third material coated over the second materialand may fill or overfill the cavities in the first material. A fourthmaterial deposited by wet deposition methods such as electroless orelectrolytic film may be coated over the third material. The removalrate of the fourth material been less than that of the third materialand during the planarization step to remove unwanted materials, thepresence of the fourth material cause a substantial co-planar topographyacross the substrate.

As for additional details pertinent to the present invention, materialsand manufacturing techniques may be employed as within the level ofthose with skill in the relevant art. The same may hold true withrespect to method-based aspects of the invention in terms of additionalacts commonly or logically employed. Also, it is contemplated that anyoptional feature of the inventive variations described may be set forthand claimed independently, or in combination with any one or more of thefeatures described herein. Likewise, reference to a singular item,includes the possibility that there are plural of the same itemspresent. More specifically, as used herein and in the appended claims,the singular forms “a,” “and,” “said,” and “the” include pluralreferents unless the context clearly dictates otherwise. It is furthernoted that the claims may be drafted to exclude any optional element. Assuch, this statement is intended to serve as antecedent basis for use ofsuch exclusive terminology as “solely,” “only” and the like inconnection with the recitation of claim elements, or use of a “negative”limitation. Unless defined otherwise herein, all technical andscientific terms used herein have the same meaning as commonlyunderstood by one of ordinary skill in the art to which this inventionbelongs. The breadth of the present invention is not to be limited bythe subject specification, but rather only by the plain meaning of theclaim terms employed.

1. A method for fabricating an apparatus comprising one or moresemiconductor devices, the method comprising: obtaining a substratecomprising one or more holes in a top surface of the substrate, eachsaid hole comprising at least one of a through-hole and a recess;forming a conductive layer over the substrate, the conductive layerextending into each said hole to provide in each said hole at least apart of an interconnect structure in the apparatus, a top surface of theconductive layer having a recess over each said hole; forming asacrificial layer covering the conductive layer; and removing at least aportion of the sacrificial layer and a portion of the conductive layerto form a protrusion of the conductive layer at a location of each saidrecess over the corresponding hole.
 2. The method of claim 1 whereinsaid removing comprises a polishing process which removes thesacrificial layer and a portion of the conductive layer and forms eachsaid protrusion of the conductive layer.
 3. The method of claim 2wherein in forming each said protrusion, the polishing process removesthe conductive layer around each said protrusion.
 4. The method of claim2 wherein at a start of the polishing process, the sacrificial layer isrecessed over each said recess of the conductive layer.
 5. The method ofclaim 2 further comprising continuing the polishing process to reduceeach said protrusion.
 6. The method of claim 2 further comprisingcontinuing the polishing process to eliminate each said protrusion andprovide a planar surface at a location of each said protrusion.
 7. Themethod of claim 2 wherein the polishing process comprises a stage atwhich the sacrificial layer has been removed around each said hole butnot over each said hole.
 8. The method of claim 7 wherein at said stageof the polishing process, the sacrificial layer is recessed over eachsaid hole.
 9. The method of claim 7 wherein at said stage, theconductive layer has been partially removed around each said hole. 10.The method of claim 1 wherein at a start of said removing, thesacrificial layer is conformal.
 11. The method of claim 1 furthercomprising forming a barrier layer over the substrate and in each saidhole prior to forming the conductive layer.
 12. A method for fabricatingan apparatus comprising one or more semiconductor devices, the methodcomprising: obtaining a substrate comprising one or more holes in a topsurface of the substrate, each said hole comprising at least one of athrough-hole and a recess; forming a conductive layer over thesubstrate, the conductive layer extending into each said hole to providein each said hole at least a part of an interconnect structure in theapparatus; forming a sacrificial layer covering the conductive layer, atop surface of the sacrificial layer having a recess over each saidhole; and removing at least a portion of the sacrificial layer and aportion of the conductive layer to form a protrusion of the conductivelayer at a location of each said recess over the corresponding hole. 13.The method of claim 12 wherein said removing comprises a polishingprocess which removes the sacrificial layer and a portion of theconductive layer and forms each said protrusion of the conductive layer.14. The method of claim 13 wherein in forming each said protrusion, thepolishing process removes the conductive layer around each saidprotrusion.
 15. The method of claim 13 further comprising continuing thepolishing process to reduce each said protrusion.
 16. The method ofclaim 13 further comprising continuing the polishing process toeliminate each said protrusion and provide a planar surface at alocation of each said protrusion.
 17. The method of claim 13 wherein thepolishing process comprises a stage at which the sacrificial layer hasbeen removed around each said hole but not over each said hole.
 18. Themethod of claim 17 wherein at said stage of the polishing process, theconductive layer and the sacrificial layer are recessed over each saidhole.
 19. The method of claim 17 wherein at said stage, the conductivelayer has been partially removed around each said hole.
 20. The methodof claim 12 wherein at a start of said removing, the sacrificial layeris conformal.